Instantaneous humidity is not important. What is important at this stage is how much total moisture is lost during the entire incubation period. What you are looking for is the average over that time. A spike in humidity like that is not important, that didn't hurt the embryos.
What incubator do you have? How does it manage humidity? Many incubators have reservoirs on the bottom, usually of different sizes. In those, humidity is controlled by surface area. If you fill larger reservoirs or more of the reservoirs the humidity goes up. If you leave some dry or use smaller ones the humidity drops. The depth of water in the reservoir doesn't matter as long as it does not change the surface area. Taking water out just means it runs out of water sooner.
With that type of incubator some tricks to fine tune it are to put sponges, paper towels, or cloth washrags in a reservoir to wick water out and wet the towel or rag. The part that is out of the reservoir increases wet surface area so more water can evaporate so the humidity goes up. To reduce the humidity you can cover part of a reservoir with foil or maybe plastic wrap to reduce the surface area moisture can evaporate from. If you spill water and get some additional areas wet when refilling the reservoirs the humidity will spike until those wet areas dry off and you no longer have those wet surface areas.
If you have an incubator that handles humidity by some means other than the reservoirs on the bottom then this does not work. I'd have to know which incubator and how it handles humidity to offer any suggestions.
During the first part of incubation the developing embryos do not need a lot of air exchange. Later on in incubation they do need fresh air so they can exchange bad air for good. During the first week it doesn't matter if the vent is in or out as far as fresh air goes. But toward the end they need fresh air. Having the vent out will reduce the humidity, leaving it in will raise humidity. Personally I leave the vent out the entire incubation so I have one less variable to deal with when managing humidity.