If your incubator is still air shoot for 101 at the top of the egg.
If your incubator is forced air shoot for 99.5 at top of egg.
Most thermostats/temp indicators are close but be sure to check with a secondary thermometer that you know is accurate.
This is my preference I dry incubate for the first 18 day. The raise humidity 65 to 70 for hatch. This seems to work for my situation.