Yep I'd just let him be! It's a lot of work for them to hatch! Also not too unsual for them to be lethargic almost for a couple hours, but by the time they are fluffy they should have better stamina!
Have you considered adding a safety hole on the air cell side? Just a tiny needle/toothpick size hole in the shell so that if they internally pip but can't/don't externally pip they can still breathe.
I incubate at 99.5. So definitely give more time as they could just be slower due to the slightly cooler air. I usually have hatching humidity at 70% to prevent shrink wrapping.