I want to scoop them all up!!!
I've limited myself to mostly broody hen hatches, though I use my incubator often for the first 16 days before the hen is separated from the flock and introduced to her hatching crate. I like to let them have their freedom to go on and off the nest as they...
This is where having that second thermometer (some of us even use 2 depending on the size of the incubator) is so important. High humidity during hatch - some use a glass of water with sponge strips sticking up to increase the humidity.
Heat being too high is more problematic than a little...
Depending on your incubator, you could open a couple vents and see if that helps, or dial it back a degree or two and see if that helps. I'm far from a "purist" on the incubator remaining closed til the last baby hatches... I wait until they are dry and there are a couple/three them before...