I'm very sorry to be unable to assist you, as I have never used incubators. With the mass loss being over recommended though one would think this even unlikelier still an occurrence. It'd make more sense if it was under, but I've hatched chicks from eggs that were under recommended mass loss; it...
Since you've been controlling humidity, there goes my first possible theory. It appears to me that the chicks may have grown too large for the eggs, but I've never heard of that happening.
Not sure what's going on, sorry, but best wishes with it.