Ok so she has five chicks that are up to 5 days old now, and she's taking them off the nest for short periods but the rest of the time still sitting on another nine eggs which you think might hatch anything from now up to in about a week's time - is that right?
There's a good chance she'll abandon the nest soon, so that's something you should be prepared for. Even if you were able to save the eggs and hatch them in a DIY or borrowed incubator, you'd likely need to care for them yourself. At a minimum that would mean providing a separate area for them that the other birds can't get in, and some kind of heat source like a lamp or brooder plate unless your climate is really warm. Giving them to someone else who wants chicks to either raise themself or to give to their broody hen would be another option, if you do end up with late hatchers that your hen won't accept. (I'm assuming you don't have any other hens that are broody at the moment)
I've never made a DIY incubator, so I can't offer much advice there. There are probably threads on here if you do a search, if you decide to try doing that. I know where I am, I could put a post on Facebook if my incubator broke and probably find someone just down the road who'd let me finish hatching eggs in theirs if I needed to - that might be another possibility, idk. I think the main thing right now is to decide how much effort you're willing and able to put in to either keeping the remaining unhatched chicks alive yourself or finding someone locally who can, or whether you might need to just let nature take its course.
If you let a broody hen hatch eggs in future, you could try what a lot of people do and mark the eggs she's sitting on. That way it's easy to check if any more eggs have been added to the nest and remove them straight away.