I really doubt any harm if your temperature reading is accurate. Not all factory presets are that accurate, even with the normally high quality Brinsea incubators. It's generally a good idea to confirm those readings by independent calibration, but that's a different topic.
If the average incubating temperature is a bit low hatching can be delayed a bit. If the average is high, hatching can be a bit early. An occasional 0.5 degree C dip will probably not be noticeable. If your incubation temperature were set and held constant at 37.0 C you'd probably get just as good a hatch as if it were set at 37.5 but it would probably be a day or so late. If it were set on 38.0 C you should still be OK but hatch would likely be a bit early.
I'd want to know why it is cooling off like that, just in case there might be a problem. Just how cold is it getting in there. Most incubators claim to be able to keep up as long as the background temperature is 21 C (70 F). If it is getting that cold you might want to wrap it in a blanket or something for better insulation. Do not block vents, the developing chicks will need fresh air to breath through that porous shell.
I copied this link form the Brinsea site. I'm not familiar with the specific incubator you are using, perhaps Brinsea has it set for a cooling period. I am convinced a cooling period is not necessary and I'm not convinced it really is helpful, but I am also sure a bit of cooling won't hurt unless it gets extreme. What's important is the temperature inside the egg where the embryo is, not the air temperature around it. It takes a while for the inside of the egg to cool off.
https://www.brinsea.com/articles/news/cooling.aspx
One reason I'm not convinced cooling actually helps is that, as far as I know, the commercial hatcheries that use incubators that hold maybe 120,000 eggs each and hatch maybe 1,000,000 chicks every week don't use the cooling cycle. They have to have heard of this cooling theory and may have even paid for the studies. Two of the referenced studies are for geese, not chickens.
To sum up, your eggs are fine.