Hmmm sounds like he might be cold :/ I'm not overly sure but from what it says you opened the incubator to get the three other chick out. Was this chicken shivering like it is before you opened the incubator? If the coldness is the problem I suggest turning the incubator up a few notches see if that helps, check on em and if it doesn't help I suggest taking the chick out and holding him close to your body and cup your hands around him. I found this worked with me when mama hen hatched her eggs and the first one was cold because the hen was unsure of what to do with her a first (she now is plotting around with her adorable 3 cute chicks!)
But on the other hand the chick could be absolutely exhausted! think of it this way: you've been sitting in your egg comfortable for the past 20-21-22 days and all of a sudden you have to break out! that takes a lot of energy and many chicks totally collapse and fall asleep after the process! The shaking may mean his body is totally exhausted and he might be trying to get some rest
Just check on him every now and them, be there for your babies
Congratulations on the hatch!! hope the little fella makes it
Cheers
Mustang