They look like they failed early. From the pictures some eggs show a ok sized air bubble (best way to set humidity is size of bubble) so im going to say that your problem is not humidity. Now this isn't being argumentative but if you mess up on humidity early in the incubation you tend not to have problems until later. High humidity early leads to late death.
I would look at everything from layers that lack vitamins. humidity, oxygen and temperature. Now you said you had one hatch which should give you some good reference points. How many days from set to hatch expired as this is a better gauge of temperature than most digital sensors. If it was 1 to 2 days early that would account for early death and malformed feet. Early is a sign of high temp and as the eggs all look different it doesn't look like this was a one time event but something that has happened over at least 3 days.