There's a very good chance they'll be fine. I had a broody that had egg break in the nest while she was setting, and there was so much dried egg on the others, I was afraid they'd suffocate, or that the egg would start to decompose and contaminate the others, so I washed them all and put them back under her. Then it happened again. Washed again. Then a third time! And a fourth! This was in addition to being left to get chilled several times, due to this hen getting confused and returning to the wrong nest, repeatedly.
She ended up with only 6 eggs out of 10, and 5 hatched. I was amazed. I didn't think she'd hatch any.
I would never advise repeatedly washing eggs during incubation, (like I did that time) but if they get stuff on them, and it's either clean them off and try anyway, or toss them, I say give it a go. Nothing to lose at that point, usually.