incubating problems?

[beckysm44]

I have 36 eggs I've been incubating. Today is day 22 for most of them(day 20 for about 8 of them)... I candled them about day 14 and all were fertile and looked good...but now that I have the eggs in the hatcher i've discovered a problem! the thermometer in the incubator was reading about 5 degrees higher than the correct temp! I fixed this already with different thermometers, but now I'm not sure if the eggs will still hatch? I candled them and only a few had movement in them, most look like half of the egg is formed and half is clear. Did I mess up this whole batch of chicks??