Dear Worried,
Check the temp in your incubator - not above 100. For humidity, get a new kitchen sponge or a clean washrag, saturate it with warm (not hot) water and put in the incubator under the egg turner in the water tray - or at least where the chicks can't get wet from it.
If you can't get your chicks out tonight, open the vents on the lid of the incubator so they are getting sufficient fresh air - or they might not last the night.
If the chicks are dry - put them in a xerox sized or slighly larger cardboard box. Suspend a 75 watt bulb into the box, near 1 corner, about 10 inches from the bottom. Cover the bottom with a rough towel, or with wood shavings. Cover PART of the top of the box over the light bulb with a towel if your room isn't warm.
If the chicks are cool, they will go toward the light. If they are too warm, they can move to a cooler corner. Give them a peanut butter jar lid of water with a pinch of brown sugar in it. Use a smaller lid if they are banties.
Most chicks die of overheating rather than chilling if you are hatching indoors. Good luck.