Are these chicken eggs on day 20? If so I would just leave them at this point as if they're viable they will be hatching within next 24 hrs. And, more than likely with being this far along the last day isn't gonna make a difference as far as contamination. If its made it tgru the shell whats done is done. Its really your call tho. I would however try to get a clean spot to transfer mom and babies to. Maybe if you can, put a nest of clean next to her and try to get her to transfer to it once babes are hatched and clear other one out. You could also candle and check if babies are still moving about in eggs and alive and pull any that arent so you have no more bust. You got momma to sit this far I would not bring em inside to incubator at this point I would let her hatch and raise them, but it's really up to how you personally feel about it.