I've done safety holes made very carefully in the top of the air cell with very valuable eggs that I'm afraid of losing. I only do this after candling to ascertain that they are indeed internally pipped. Most then proceed to pip and zip on their own, but there have been some that were malpositioned (such as the feet over head position) so that they couldn't externally pip and actually would have died had I not intervened. This is rare though.
I wouldn't immediately jump to that being the reason yours are late. Other things first: how has your incubator temp been throughout incubation? Do you have still air or forced? Could there have been cold spots that slowed development or hot spots that sped it up for the already hatched chicks? Have you candled to check that they are still alive or to see if they have internally pipped? They may have died in late incubation. Which brings me to another question, how was your humidity? Late incubation death is usually caused by the humidity not being right, so if they did die, you might want to take a look at that as a possible cause.
All that said, I have had chicks hatch as late as 25 days before. You may just need to wait. Also, what was the date that you set them on?