This is a bad situation. in the last three days of incubation, humidity should have been at 60-80% . splashing water onto the eggs is even worse, because the chick breathes inside the shell and if you clog the shell's pores with water you'll kill the chick! (it's a lot easier to do than you think.) during lockdown (last three days) you should have NOT been moving/holding the eggs/incubator, the slightest movement can harm hatch rates. plus, during lockdown you do NOT turn the eggs. this can result in killing the eggs.
Also, even if the chicks do hatch, they will most likely die hatching, or right after the hatch. much of the time the strong chicks survive bad incubating situations only to hatch and die, or be weak/sick/deformed and un-able to live.
and, if you have only one successful hatcher, this could be a problem because a chick raised alone can die of depression, and not being around other chicks/chickens in their baby years can leave to behavioral problems in chicken adulthood.
sorry for being strict to you, but I have been through this situation before, and I don't want to see it happen again.
happy hatching, hopefully you'll have some little fighters who pull through! I'm sorry for you loss of the other eggs, just try and keep the eggs you still have alive. since it's day 21, do not open the incubator. (you shouldn't do this weather it's day 21 or not LOL) don't touch the eggs, or do anything but higher the humidity (NO water splashing!) and keep the temp. under control. Happy hatching!