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Wow, that's a VERY late hatch! As late as day 27, you're lucky to get any chicks at all! I assume that it it IS chickens you're hatching? Not ducks? (Hey, just checking!) My advice would be to float the eggs to check for movement or tap them to listen for scratching sounds. I'm sorry, but I'd expect the rest of them to not be alive at this point. If you can stomach it, it might be worth opening the eggs to see what stage they got to...
Your temps were almost certainly too low, so for your next hatch, calibrate your thermometer and adjust your incubator temp. Most thermometers aren't very accurate...
Are your three chicks healthy?