There are quite a few links on troubleshooting in the Read Me's on Hatching sticky at the top of this forum. I hope this helps.
https://www.backyardchickens.com/forum/viewtopic.php?pid=1509685#p1509685
I didn't read the other responses (sorry), but I would guess too high humidity for reasoning.
https://www.backyardchickens.com/forum/viewtopic.php?pid=1509685#p1509685
I didn't read the other responses (sorry), but I would guess too high humidity for reasoning.