Hmmmm...
Well, could be the strain of silkies, could be a humidity/ventilation issue, or could be a temp issue.
I usually hatch silkies at about 30-35% humidity for the 1st 18 days. Then 50-60% at lockdown.
Do you use a turner? I suppose it could also be that they weren't positioned right to hatch.
There are so many variables to determining hatch rates. Unfortunately, sometimes the only way to figure out what went wrong is to change one thing about each hatch until you find out what works for you.
When I have issues with chicks that made it to lockdown, but didn't hatch, it was usually a humidity issue.
Were you incubating any other types of chicks, or just the silkies? If you were incubating other breeds/strains of chicks - you could rule out genetics.
Each hatch is a learning experience.
Good luck with your next hatches.