My first hatch yesterday/today as well. Today is 21 days for us, but our hatch really went wild yesterday. I thought it would be better than this. I guess I kind-of thought it would be closer to all or nothing instead of half.
Of 32 I have 13 that hatched correctly.
1 that pipped low and blew spit bubbles before dying like yours did (I tried to help it when it started foaming and found that it was really deformed and had pipped low, the air sack did have air if the chick could have positioned itself right to get to it. I'm guessing the weird shape of it's spine, neck, and head prevented that.).
1 that I helped because it pipped near the big end then over 24 hours zipped it's way down to the pointy end and stalled out. (Where was she going? LoL) I waited a long time to help that one and it is in with the other 13 now and doing fine. I don't even know which one it is anymore.
I've got one pipped and zipping this morning.
There are 16 with no action at all that I can see.
I'm keeping the humidity up and leaving these eggs alone. I am using a still-air and some people say that these eggs may still be viable and could have been slower to develop if they were in the cooler parts of the incubator.
I'm sorry yours are taking so long. Really, everyone's advice is going to be let them alone. If they have pipped and your humidity is in a good range, I'd let them be for at least 24 hours or more to work on getting out when they are ready. I moved super fast and added extra warm water every time I grabbed a chick out through the window. The one I helped, I grabbed out quick too and held it in a warm damp paper towel and picked just enough off so that it could push it's way out if it was strong enough, then I put it right back in the incubator to finish in it's own time. This whole process has been nerve wracking and not as much fun as I thought. It was great right up until hatching, but now it is just plain hard.