Good Morning chickiepoo!!!!
So far it's sounding really good!!! Those 3 have an excellent chance of hatching!!! It still may take a day or 2...just keep an eye on them. If it seems they're having trouble breaking through , LIGHTLY mist the eggs with lukewarm water, being careful not to spray it into any holes they may have pipped(that could drown them)....but I'd give it a while before I attempted spraying them. Also, it's best to keep the bator closed as much as possible to keep the humidity at the proper level, which is crucial during the hatch.....consider this as "lockdown" and proceed accordingly. The other 3 eggs still have a chance....they're maybe lagging behind a bit....that happens in a lot of my hatches,especially with duck eggs.
Good luck!!!! Speak to you later!!
Kathy
P.S. Hey, are you a doctor or a nurse??! I think it's normal for their breathing to be more rapid than usual......trying to break out of an egg is stressful and very tiring. By the time they hatch, they're totally exhausted.