Chickens wake up 1200 times a night when every little noise does so, then immediately go back to bed. They'll be just fine as long as you didn't panic them like a predator absolutely will.
I often do a head count / butt count before I close the door on mine and will reach in and give them a reassuring it's me, good night now light ruffle on their belly's or butts, depending which side is facing me. Fluffy, squeals and gets all poofty, the others make the chicken sound, one used to peck at me, but everytime she did, fluffy or midnight would peck her and give an upset chicken sound so she quit that very fast.
They'll be just fine.
Aaron