Okay - you get the humidity up by increasing the surface area of water: a wide, shallow pan will raise the humidity much higher than a narrow, deep cup or bowl.
I get the humidity up in my incubators by covering the bottom with wet washcloths (my
Brinsea Octagon 20 Eco incubator has water channels in the bottom, so I dip the edges of the washcloths into the channels so that they stay wet until the channels dry out - you could probably rig up something similar with washcloths and dishes of water).
Like
holachicka said, only use very warm water so that it doesn't cause a temperature drop. If your incubator is heated by a lightbulb, it's a good idea to have a high-wattage bulb on a dimmer so you can adjust it around some - BUT, I wouldn't mess with that now that you already have eggs in there - just for future reference.
Another thing - you might already know this, but just in case - since your humidity has been so low, do not mist the eggs at all! A lot of people mist Call duck eggs with warm water a few times a day - it's supposed to increase hatch rates, there are people that
swear by it. However, spraying water on the egg will cause moisture to be drawn out of the egg as it evaporates off the shell. It
sounds backwards, but misting the eggs makes them dry out more. So, in your case, misting them is probably a bad idea.