Candle and see what the air cells look like size wise. It's important they get big enough so that there is enough air in there to sustain the chick until it can make an external pip (as opposed to the chick 'drowning').
I've incubated quail at 80% the whole time and I've never had a problem with them, but I haven't hatched chicken eggs in an incubator so I'm not sure how it would affect them. Try not to get too hung up on the numbers and keep an eye on the air cell size as a way of gauging how they are progressing. I've found with my incubator that I can't fill up even one of the wells without the humidity getting too high so I have previously used a small cup for the first phase of incubation (before I started doing staggered hatches with my quail eggs and finding humidity wasn't as essential as I'd first thought and after some research a small incubator is less affected by humidity). With higher humidity it's essential that the temperature is bang on, if not slightly higher, as the correct temperature enables to growing chick to absorb what it needs, and the egg to evaporate off what it doesn't need.
How far along are you? You could give them a few days of no water in the incubator (though the humidity should never fall below 25%). Fingers crossed for your eggs.