That's a little hard to answer. It is important to have stable and correct temperatures from when you start. Temperature fluctuations can cause problems with proper development at that stage. Not just birth rates but actually misshapen or deformed chicks. I said CAN, not absolutely, every time, without fail, 100% for sure.
Odds are that it did not have a big effect. Of course, it depends on how long they were at those temperatures. The core temperature is what is important, not the temporary air temperature. It takes a while for the center of the egg to change. And a lot of people would be surprised at how tough those chicks can be.
I'm not going to hold your hand and say everything is hunky-dory and you have no problems. But I'm also not going to tell you to throw them out and start over. I'd get it stabilized and continue. It is very possible your hatch will not be affected at all. It is also possible it will be affected. It's possible something else entirely will have an effect. I just don't know.
