It sounds like you're doing everything right! All you can do now is wait and avoid opening the incubator (keep that humidity up!). The chicks should hatch fine on their own. If one or two eggs seem to be struggling, wait 12-24 hours and then you can try helping them out. If you help earlier, you risk making unabsorbed blood vessels start bleeding.
Leave any chicks that hatch in the incubator for about 24 hours, then move them to the brooder. Most of the eggs should hatch within one or two days, but there may be some late ones. I would leave any unhatched eggs in the brooder until at least day 23.