Chicks died while pipping

[CrazyChickenLady2017]

Hello, im wondering if anyone knows why my chicks would die while pipping? They were at day 21 and pipped a out halfway around the egg. Then they just stopped and on day 22 i went to help and they were all dead.

I had 24 eggs in the incubator. 14 hatched no issues, 2 didnt hatch at all and the rest pipped a small area and then died.

 

[Ol Grey Mare]

The successful hatches.....did they finish before, during or after the failed birds stopped moving? Did you open/close repeatedly moving the hatched chicks?