Okay, I just copied some info to help you decide what to do. Maybe you've already read it, but it's worth backtracking to review and make a decision based on the right info not an emotional desire to help. It's hard when all you want to do is make sure they're okay. I'll post the part I copied and also the link so you can read the whole thing. Here's the link:
https://www.backyardchickens.com/a/step-by-step-guide-to-assisted-hatching
And here's the particular stage I think you're at: but I recommend reading or rereading it before doing anything... plus I think you'll need to use the link to see photos as to what to look for.
If the majority of your chicks have hatched or its past day 21
(for Chicken eggs),it's time to.... CANDLE & Tap! Candle and look for an internal pip. Pencil mark the air cell.
Below is what an internal pip it looks like.
The beak is thrust through the inner membrane into the air cell.
Tap with your fingernail GENTLY on the air cell and hold to your ear, Can you hear a peep?
**IF** YOU DO NOT HAVE AN INTERNAL PIP AND YOU CAN’T HEAR CHIRPING and but you do SEE MOVEMENT, place that egg BACK in the incubator and WAIT, this EGG DOES NOT need assisting at this point!
**IF** however YOU DO NOT HAVE AN INTERNAL PIP AND YOU CAN’T HEAR CHIRPING and YOU DO NOT see MOVEMENT please proceed to The Float Test ~ Checking Egg Viability. Give Eggs A Full 24 Hrs Overdue Before Float Testing ONLY AFTER CANDLING and NO Internal pips and NO internal MOVEMENT or CHIRPING! This procedure takes very little equipment Or time to do and Is Easy To Perform. If your egg is still viable, place back in the bator and wait!
https://www.backyardchickens.com/t/...ng-egg-viability-for-late-or-overdue-hatching Now its time to assist if… Your Beyond THE WAITING PERIOD and you’ve followed ALL steps above! Assist if YOU HAVE AN INTERNAL PIP AND you hear CHIRPING,OR YOU HEAR CHIRPING and No PIP...... AND you clearly understand the hatching process, AND you are CERTAIN its time to intervene, AND you have READ THROUGH this ENTIRE ARTICLE, AND you understand THE STEPS to ASSIST, AND you HAVE PATIENCE, If NOT, DO NOT TOUCH THAT EGG!