I candled again this evening and they were in the exact same position they had been in for over 24 hours with no movement, not even a tiny wiggle. So I made a safety hole and those turned into eggtopsies. The babies were definitely dead before I intervened. All three had not absorbed the yolk whatsoever, and I didn't notice any obvious deformities. One was definitely malpositioned but I think the other two looked okay. The first one I eggtopsied (malpo, no pictures because I didn't think to take any) didn't have any obvious moisture build up, but the membrane was a little tight - it may be worth noting that this egg had a severely saddled air cell. The membranes on the other two seemed fine, and there was liquid inside the egg behind the membrane, but I think this was the albumen?
My humidity stayed relatively stable throughout this process, around 50%, and I increased it to 60% for lockdown. I misted/cooled the eggs once a day starting at D8. Instead of misting AFTER (this is what I had I read to do) the cooling period (I did 10 min) I misted BEFORE the cooling period, as when I missed after cooling the humidity spiked to 99%+ (which I rectified as best I could immediately).
I will try to post pics of the eggtopsies beneath a spoiler in a separate post if I can get it to cooperate...I have been having bad luck uploading pics lately.